Substrate transport apparatus

ABSTRACT

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.11/178,830 entitled “Substrate Transport Apparatus” and filed on Jul.11, 2005 (now U.S. Pat. No. 8,573,919) the disclosure of which isincorporated by reference herein in its entirety.

BACKGROUND

1. Field

The disclosed embodiments relate to substrate transport apparatus and,more particularly, to substrate transport apparatus that areconfigurable and interchangeable.

2. Brief Description of Related Developments

Advances in electronics and electronic devices have been fueled by thetwo main prongs of consumer desires; ever more sophisticated and smallerelectronics/electronic devices; at ever lower prices. To provide thesought after advances in electronics commensurate advances are desiredin the manufacturing (whether facilities, tools or processes) of theelectronics. The introduction and continuing expanded use of automationin fabrication of electronic devices has achieved a two fold benefitcorresponding almost directly with the main consumer desires. Automatedmanufacturing of electronics has provided between precision and reducedcost of fabrication. The improved precision of automated manufacturingleads to the ability to increase and improve miniaturization ofelectronic components. Also, though having a higher one time cost, thannon-automated manufacturing systems, the automated manufacturing systemsmay be operated on a substantially continuous basis ultimately resultingin lower manufacturing costs for the devices produced therewith.Further, the improvement in precision/accuracy of the automatedmanufacturing devices, over their non-automated counterparts, results incommercially significant reductions in manufacturing rejects and defectsthereby again leading to lower manufacturing costs for the fabricateddevices. One area of manufacturing of electronic devices that has lentitself well to using automation has been the transport apparatus,devices, also referred to as robots, handling and transporting flatpanels (e.g. wafers, reticles, pelicles, flat panel displays) betweenvarious processing stations. One example of a conventional robot for usein a clean room environment is disclosed in U.S. Pat. No. 4,787,813,issued Nov. 29, 1988. The conventional robot disclosed therein has adrive system with a support assembly. A first arm of the robot isrotatably supported by the support assembly and is raised and lowered bythe support assembly. Drive structure for rotating the support assemblyis mounted on a base. Drive structure for rotating a second arm and endeffector are mounted at the upper end of the support assembly. U.S. Pat.No. 6,634,851, issued Oct. 21, 2003 discloses another example of aconventional workpiece handling robot that has a base and backbone. Thebase of this conventional robot has a linear drive system and a mast onthe linear drive system. A shoulder drive system rotates the mast andproximal arm link mounted to the mast. An elbow drive is mounted to theproximal link for rotating a distal link relative to the proximal link.The conventional robot has an end effector that is slaved. As may berealized, the aforementioned conventional robot has limited freedom ofmovement as it lacks a drive system, or an independent drive axis, forindependently driving the robot end effector. Nor can this conventionalrobot be readily configured to provide a robot configuration wherein theend effector is independently movable. The aforementioned conventionalrobots are exemplary of conventional robots in general. Each robot isspecifically configured for a particular arrangement. Moreover, once therobot configuration is set, the configuration is substantially fixed andnon-variable in major respects. In effect the conventional robots cannotbe reconfigured without substantially tearing down the robot andrebuilding it anew. This limits the interchangeability andinteroperability of conventional robots and results in FAB operatorshaving many generally similar yet not interchangeable robots. By way ofexample, a FAB operator may have conventional 3 axes, 4 axes and 5 axesrobots (each for a corresponding processing station or tool where a 3axes, 4 axes or 5 axes robot is appropriate). Although generally similarin configuration (e.g. the conventional robots are all scara type),nevertheless the conventional 3 axes, 4 axes and 5 axes are notinterchangeable, and reconfiguring of the conventional robot (e.g.configuring a 3 axes conventional robot to 5 axes or vice versa)involves complete tear down and rebuilding of the conventional robot.Hence, if a conventional robot (e.g. 3 axes) is brought off line, suchas for maintenance, and a spare conventional robot with a differentconfiguration is available (e.g. 4 axes), the spare conventional robotwith the different configuration is not swappable with the offline robotnor can the spare robot be reconfigured so that it may become swappablewith the offline robot. Accordingly, in the case of conventional robotsproduction at the process stations served by the offline robot remainsstopped until the offline robot is restored, or the FAB operatoracquires another robot with the same configuration. This is highlyundesirable.

Another problem of conventional robots, as may be realized from theaforementioned examples, is that the robots movement definition (e.g.the difference between the true position of a desired point/location onthe robot and the expected position of the same point commanded by therobot controller) is rather limited. Though this limited movementdefinition may arise from a number of factors, one large contributingfactor are undefined robot motions (robot movements that are not sensedand registered by the robot controller). One cause of undefined robotmotions is the flexibility of the robot (i.e. its structure or drivesystem), and the foundation supporting the robot due to dynamic loads.The exemplary embodiments of the present invention overcome these andother problems of conventional workpiece fabrication systems as will bedescribed below.

SUMMARY OF THE EXEMPLARY EMBODIMENTS

In accordance with one exemplary embodiment, a substrate transportapparatus is provided. The substrate transport apparatus comprises aframe, a drive section and an articulated arm. The drive section isconnected to the frame. The drive section has at least one motor modulethat is selectable for placement in the drive section from a number ofdifferent interchangeable motor modules. Each having a differentpredetermined characteristic. The articulated arm has articulatedjoints. The arm is connected to the drive section for articulation. Thearm has a selectable configuration selectable from a number of differentarm configurations each having a predetermined configurationcharacteristic. The selection of the arm configuration is effected byselection of the at least one motor module for placement in the drivesection.

In accordance with another exemplary embodiment, a substrate transportapparatus is provided. The transport apparatus comprises a frame, adrive section, and an articulated arm. The drive section is connected tothe frame. The articulated arm is connected to the drive section forarticulation of the arm. The arm has an upper arm length, a forearmlink, and at least one end effector link. The forearm link is pivotablyjoined to the upper arm link and the end effector is pivotally joined tothe forearm link. The drive section has a first drive section portionand a motor module connected to the first drive section portion. Themotor module has at least one motor for independently pivoting eitherthe forearm relative to the upper arm, or the end effector relative tothe forearm. The motor module is selectable for connection to the firstdrive section portion from different interchangeable motor modules eachhaving a different predetermined characteristic.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features of the present invention areexplained in the following description, taken in connection with theaccompanying drawings, wherein:

FIG. 1 is a schematic perspective view of a substrate processingapparatus, incorporating features of the present invention in accordancewith one exemplary embodiment, and substrate transport containers C;

FIG. 2 is a perspective view of a substrate transport apparatus of theprocessing apparatus shown in FIG. 1;

FIG. 2A is another perspective view of the substrate transport apparatusin FIG. 2 with some section removed for clarity;

FIG. 3 is a plan view of the substrate transport apparatus;

FIG. 3A is an enlarged partial plan view of the substrate transportapparatus;

FIGS. 4A-4B respectively are exploded perspective views of the substratetransport apparatus showing portions of the drive system of thetransport apparatus;

FIGS. 5A-5B are respectively a perspective view of a transport apparatussupport structure with a linear drive carriage of the transportapparatus drive system located therein, and another perspective view ofthe transport apparatus support structure with the drive carriageremoved;

FIG. 5C is a elevation cross sectional view of the support structure inFIG. 5A;

FIG. 5D is an enlarged partial cross sectional view of the supportstructure and a portion of the linear drive carriage in FIG. 5A;

FIG. 6A is a top plan view of the support structure in FIG. 5A showing amounting system of the support structure;

FIG. 6B is an enlarged partial perspective view of the support structurein FIG. 5A;

FIG. 7 is a perspective view of an upper arm and a portion of the drivesystem of the substrate transport apparatus in FIG. 2;

FIG. 7A is a cross section view of the upper arm shown in FIG. 7;

FIGS. 7B-7C are respectively a top perspective view of the upper arm inFIG. 7, and a bottom perspective view of the upper in FIG. 7;

FIG. 8 is a top plan view of the upper arm section and the portion ofthe drive system shown in FIG. 7;

FIG. 9 is a perspective view of a drive system module of the substratetransport apparatus shown in FIG. 2;

FIG. 10 is a perspective view of a forearm of the substrate transportapparatus in FIG. 2;

FIG. 10A is a top plane view of the forearm in FIG. 10;

FIG. 11 is a cross-sectional view of the forearm in FIG. 10;

FIG. 11A is a partial cross-sectional view of a shaft system at an elbowjoint of the forearm; and

FIG. 11B is a partial cross-sectional view of a shaft system at a wristjoint of the forearm.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT(S)

Referring to FIG. 1, a perspective view of a substrate processingapparatus 10 incorporating features of the present invention isillustrated. Although the present invention will be described withreference to the embodiment shown in the drawings, it should beunderstood that the present invention can be embodied in many alternateforms of embodiments. In addition, any suitable size, shape or type ofelements or materials could be used.

In the embodiment illustrated in FIG. 1, the apparatus 10 has beenshown, for example purposes only, as having a general substrate batchprocessing tool configuration. In alternate embodiments, the substrateprocessing apparatus may have any other suitable configuration, as thefeatures of the present invention, as will be described in greaterdetail below, are equally applicable to any substrate processing toolconfiguration including tools for individual substrate processing,stockers, sorters, metrology tools or any other desired tool. Theapparatus 10 may be capable of handling and processing any desired typeof flat panel or substrate such as 200 mm or 300 mm semiconductorwafers, semiconductor packaging substrates (e.g. high densityinterconnects), semiconductor manufacturing process imaging plates (e.g.masks or reticles), and substrates for flat panel displays. Theapparatus 10 may generally comprise a front section 12 and a rearsection 14. The front section 12 (the term front is used here forconvenience to identify an exemplary frame of reference, and inalternate embodiments the front of the apparatus may be established onany desired side of the apparatus). The front section 12 has a system(as will be described in greater detail below) providing an interfaceallowing the importation of substrates from the FAB into the interior ofthe apparatus 10. The front section 12 also generally has a housing 16and automation components located in the housing handling substratesbetween the rear section 14 and the front section interface to theexterior. The rear section 14 is connected to the housing 16 of thefront section. The rear section 14 of the apparatus may have acontrolled atmosphere (e.g. vacuum, inert gas), and generally comprisesa processing system for processing substrates. For example, the rearsection may generally include a central transport chamber, withsubstrate transport device, and peripheral processing modules forperforming desired manufacturing processes to substrates within theapparatus (e.g. etching, material deposition, cleaning, baking,inspecting, etc.). As noted before, in alternate embodiments the rearsections of the apparatus may be configured to process substrates as asorter stocker or other desired processing or handling tool. Substratesmay be transported, within the fab, to the processing apparatus 10 incontainers L. The containers L may be positioned on or in proximity tothe front section interface. From the containers, the substrates may bebrought through the interface into the front section 12 using automationcomponents in the front section. The substrates may them be transported,via load locks 14L, to the atmospherically controlled rear section forprocessing in one or more of the processing modules. Processedsubstrates may then be returned, in a substantially reversed manner, tothe front section 12 and then to the transport containers F for removal.

The front section 12, which may otherwise be referred to as anenvironmental front end module or EFEM, may have a shell or casingdefining a protected environment, or mini-environment where substratesmay be accessed and handled with minimum potential for contaminationbetween the transport containers T, used to transport the substrateswithin the FAB, and the load locks 14L providing entry to the controlledatmosphere in the rear processing section 14. Load ports or load portmodules 24 (two are shown in FIG. 1 for example purposes, but more orfewer may be used) are located on one or more of the sides of the frontsection providing the interface between the front section and FAB. Theload port modules may have closable ports 300 forming a closableinterface between the EFEM interior and exterior. As seen in FIG. 1, theload port modules may have a support area for a substrate transportcontainer C. A secondary holding area may also be provided under thesupport area, where transport containers may be temporarily buffered.The transport container support area may allow automated movement of thetransport container C supported thereon to a final or docked position.

As noted before, the front section of apparatus 10 may have automationcomponents to effect transfer of the workpieces between the transportcontainers C, interfaced to the apparatus, and the various processingstations in the front section or rear section of the apparatus.Referring now also to FIG. 2, the apparatus 10 may have a workpiece orsubstrate transport apparatus 20 in the front section 12 with a reachthat is sufficient to pick/place substrates in the containers C and anydesired stations in the front and rear sections 12, 14. For example, thetransport apparatus 20 may be capable of reaching, through closableopenings 300, to pick/place substrates inside the container(s) T. Thetransport apparatus 20 may also be capable of reaching to pick/placesubstrates inside loadlocks 14L. Hence, transport apparatus 20 iscapable of picking substrates from the container(s) and transporting thesubstrates for placement inside loadlocks 14L, and vice versa. Thetransport apparatus 20 generally has a support structure or base 22, amovable arm 24 and a drive system 26. The drive system 26 is connectedto the support structure 22, and the movable arm 24 is operablyconnected to the drive system 26 so that the drive system can move thearm. The support structure 22 attaches the transport apparatus 20 to thefront section 12 of apparatus 10. The front section 12 of apparatus 10may have a traverser (not shown) with a carriage capable of traversinglaterally relative to the front section (in the direction indicated byarrow X in FIG. 1). In this case, the support structure 22 may beattached to the traverse carriage of the traverser. Alternatively, thefront section may not have a traverser, wherein the support structuremay be attached to the structure of the front section. The transportapparatus support structure may have a rigid spine load bearing member.The support structure may have a side mounting arrangement for mountingto the front section. The side mounts of the support structure maydepend from the side of the rigid spine member of the support structureas will be described in greater detail below. The side mounts define akinematic coupling enabling the transport apparatus to beinterchangeable. The movable arm 24 has articulate links and endeffector(s) for holding substrate(s). The drive system 26 hasindependent drives joined to the movable arm to move the arm endeffector(s) in the R, θ and Z directions (as indicated by arrow R, θ andZ in FIG. 1). The Z drive section of the drive system may be integratedinto the spine member as will be described in greater detail below. Thedrive section may also have a removable drive module that is selectablefrom a number of different interchangeable drive modules to select adrive configuration of the drive system. Also as will be describedbelow, the removable module can be swapped with another interchangeablemodule to change the number of independent drive axes of the drivesystem and hence reconfigure the drive system. This also allows themovable arm to be reconfigured. The movable arm may be mounted on aturret. The turret and one of the articulated arm links may be formedintegrally as a one piece member as will be further described. Theselectable drive module may be removably mounted to the arm portion ofthe turreted arm link.

FIG. 2A is another perspective view of the substrate transport apparatus20 with portions of the apparatus removed for clarity. FIG. 3 is a planview of the apparatus 20, and FIGS. 4A-4B are respectively an explodedperspective view of the apparatus with the arm 24 exploded from thesupport structure 22, and another exploded perspective view with the armlinks and a portion of the drive system shown in an exploded manner. Inthis exemplary embodiment, the articulated arm 24 is illustrated asbeing a scara type arm with an upper arm 28, a forearm 30 and endeffectors 32A, 32B. In alternate embodiments, the articulated arm may beof any suitable type, and may have more or fewer end effectors. As seenin FIGS. 2-2A, the upper arm 28 is pivotally mounted (as will bedescribed in greater detail below) to rotate relative to the supportstructure 22 about shoulder axis T. The pivot mount of the upper arm 28to support structure 22 forms shoulder joint 27. The forearm 30 ispivotally mounted to the upper arm 28. The pivot joint 29 betweenforearm 30 and upper arm 28 may be referred to as elbow joint, withcorresponding rotation axis T₂. The end effectors 32A, 32B are pivotallymounted to the forearm 30 at the wrist joint 31, having axis of rotationW (see FIG. 2). As noted before, the drive system 26, in the exemplaryembodiment, may have a Z drive section 34, a shoulder or T₁ axis drivesection 36 and drive section 38 for driving one or more arm links aboutone or more other rotation axes as will be described below. In theexemplary embodiments the Z drive section 34 and T₁ drive section aremounted to the support structure 22. Drive section 38 is mounted to thearm 24.

Still referring to FIG. 2, the support structure 22 is shown with anenvironmental casing 27C enclosing the support structure. The supportstructure 22 is best seen in FIG. 5B. The support structure 22 generallycomprises a spine member 42 and end plates 44, 46. The spine member 42extends substantially the entire length of the support structure 22. Endplates 44, 46 are connected to the opposite ends of the spine member 42as shown. In this embodiment, the support structure 22 is of monocoqueor semi-monocoque construction (i.e. the walls or shell formed by thespine member 42 are load bearing and carry the loads imparted on thesupport structure). As seen in FIG. 5B, the spine member 42 has anelongated, general channel shape. The spine member has a backside 42Sand opposing flange walls 42W to form the channel shape and define aninterior space in the spine member that project as shown from thebackside. In this embodiment, the spine member 42 is of unitaryconstruction (i.e. a one piece member). The spine member may be forged,cast or formed in any other suitable manner from any suitable metal,such as stainless steel or aluminum alloy. In alternate embodiments thespine member may be made from any other suitable material includingplastics, ceramics or composites. The spine member is highly rigidcompared to space frame construction defining a similar interior spaceas the spine member 42. Referring now also to FIG. 5C, there is shown across-section of the support structure 22. As seen in FIG. 5C, the endplates 44, 46 are joined to opposite ends of the spine member 42 using ageneral rabbit joint configuration.

The end plates 44, 46 help define the interior space of the supportstructure that is of sufficient size to encompass portions of the drivesystem and the turret of the articulated arm. At least one of the endplates 46 may provide a mounting platform for components, such as anelectronics package E supporting for example power and communicationsignals for drive system 26. The spine member 42, however, serves as theprimary load bearing member as substantially all static and dynamicloads of the transport apparatus 20 are ultimately delivered to andborne by the spine member. Moreover, as will be described further below,the drive system 26 and the arm 24 supports therefrom are, foundationeddirectly from the rigid spine member. The drive system sections thatestablish the prime drive axes (e.g. shoulder axis T₁ and Z drive axisshown in FIG. 1, which define the attitude of the substrate transportplane and along which the R, θ motions of the end effector(s) 32A, 32Bare conducted) are integrated in the spine member. Thus, the rigid spinemember 42 of the support structure 22, rigidly fixes the prime driveaxes relative to each other during static and dynamic loading impartedby the motions of the drive system and the arm, or by motions of thetraverser, in the event the transport apparatus 20 is mounted on atraverser.

As seen best in FIG. 5B, the linear rails 26R for the drive systemZ-drive section are integrated with the spine member 42. The linearrails 26R are the guide rails for the platens 26P of the drive systemZ-carriage (see also FIG. 5A). Thus, rails 26R help define theorientation of the Z-axis along which carriage 50 is moved. In thisembodiment the linear rails 26R are located on backside 42S of the spinemember 42, though in alternate embodiments the rails may be placed inany other desired location on the spine member. Also, in this embodimentthe rails 26R are fastened to the spine member 42. The rails may befastened to the spine member with any suitable mechanical fasteners, ormay be attached by brazing, welding or any other suitable metallic orchemical bonding. In this embodiment, the backside 42S of the spinemember may have seating surfaces 42M (see also FIG. 5L which shows across-section view of the support structure 22) on which the linearrails 26R are seated when mounted to spine member 42. The seatingsurfaces 42M may be formed, for example by machining or other suitableforming process, to be substantially parallel with each other (e.g. leftside and right side seating surfaces 42M are substantially parallel orif desired substantially co-planar) and parallel to the Zs axis (seeFIG. 5C) defined by the spine member as will be described below. Inalternate embodiments, the slide rails may be integrally formed on theunitary construction spine member.

Referring still to FIGS. 5B-5C, and also referring to FIG. 5D showing anenlarged partial cross-sectional view of the support structure 22 anddrive system 26, the spine member 42 has a collar 48. In thisembodiment, the collar 48 is formed integrally with the unitaryconstruction spine member 42. The collar 48 is located as shown, on thebackside 42S of the spine member. The collar 48 may be substantiallycentered between the two linear rails 26R as shown in FIG. 5B. Inalternate embodiments, the collar may be located at any other desiredposition on the spine member. The collar may also be mechanicallyattached to the spine member with suitably rigid attachment. As seen inFIGS. 5B-5D, the collar 48 holds and provides the foundation support forthe Z-drive section of the drive system 26. Thus, the Z-drive section ofthe drive system is integrated into the spine member 42S by integralcollar 48. As noted before and seen best in FIGS. 5C-5D, in thisembodiment drive system 26 has Z-drive section 34 that is a linear drivegenerally comprising motor 54 driving ball screw 52. In alternateembodiments, the drive system may have any other desired type of lineardrive providing a Z axis drive. Motor 54 may be any suitable motor, suchas a brushless DC, AC or stepper motor. The ball screw 52 may be coupledto an output shaft of the motor, or may have a shaft extension 52E,extending into the motor, on which the motor rotor 54R is mounted asshown in FIG. 5D. The Z-drive motor 54 may also have a suitable encoder54E, mounted to the motor shaft or shaft extension, to facilitate thedesired motor control with tool controller 400 (see also FIG. 1).

As seen in FIG. 5D, the collar 48 has a bore 48B with center axis Zs.The ball screw 52 is radially held in bore 46B by suitable bearings 53.Thus, the ball screw 52 is concentric with bore 48B in the collar, andthe center axis of the ball screw, or the Z axis of motion provided bythe screw when rotated by motor 54, is substantially coincident with thecenter axis Zs of the bore 48B in collar 48. The bore center axis Zshence defines the Z-axis of motion of the Z-drive section 34. Moreover,as the linear rails 26R are established substantially parallel to axisZs (arising from the parallelity of the seating surfaces 42M to axis Zsas described before) which is also substantially the center axis of theball screw 52, and as both the rails 26R and balls screw 52 are held onthe common rigid spine member 42, this ensures that the parallelitycondition initially established between the rails 26R (and hence theZ-carriage 50 riding on the rails) and the ball screw 52 driving theZ-carriage 50 in the Z-axis is ridigly maintained at all times. Staticand dynamic loads on the drive system 26 and support structure 22 duringoperation of the transport apparatus 20 will not cause any change inalignment between the ball screw and rails, and hence no change inalignment between Z-axis and the shoulder axis of rotation T₁ (definedby carriage 50 as will be described further below). Thus, as notedbefore, the prime axes of motion T₁, Z of the drive system that definethe attitude of the substrate transport plane remain in a substantiallyrigid orientation. The ball screw 52 is vertically locked to collar 48by a suitable support ring 51 as shown in FIG. 5D. In the embodimentshown, the collar 48 may extend to form a housing for motor 54. Themotor stator 54S may be mounted within the bore 48B of the collar. Inalternate embodiments, the Z-drive motor may be in a separate housingthat in turn is supported from the spine member so that the position ofthe motor relative to the ball screw holding collar of the spine memberis substantially rigidly maintained. As seen in FIG. 5C, the upper endof the ball screw 52 is held by the end plate 44. A suitable bearingconnects the end of the ball screw to the end plate 44. In thisembodiment, the end plate 44 has a bore or recess that retains the endof the ball screw and support bearing. The bore in the end plate may beestablished to be concentric with the ball screw aligned along axis Zs.In alternate embodiments, the recess or any other retention mount forholding the end of the ball screw on the end plate may be variablyadjusted to be concentric with the ball screw.

As seen in FIG. 5C, the backside 42S of the spine member has mountingsystem 60 used for mounting the transport apparatus 20 to the frontsection 12 of the processing apparatus 10 (e.g. directly to thestructure of the front section or to the traverser). The mounting system60 on the side of the spine member serves as the sole mounts connectingthe transport apparatus 20 to the traverser/front section structure.Thus as may be realized further improves maintaining the alignment ofthe drive axis, and hence of the substrate transport plane of thetransport apparatus, during operation of the transport apparatus,because of the highly rigid structure spanning between the drive systemcomponents to the mounting system 60. The mounting system 60 maycomprise a kinematic coupling that is deterministic in positioning thesupport structure 22, and hence the apparatus 20, in a desired locationand with a desired orientation relative to the reference frame of thefront section 12. As may be realized, the position deterministicfeatures of mounting system 60 may be established to have a desiredrelation to the Z axis and T₁ axis (see FIG. 1) of the transportapparatus (as will be seen further below the positioning T₁ axis may berelated or based from the Z_(s)/Z₁ axis, and in combination with thehigh rigidity of the interposing structure, e.g. the spine member 42,between the drive section 38 establishing axis T₁ and mounting system60, this may allow setting the deterministic features relative to theZ_(s)/Z₁ axis to ensure that the T₁ axis is in the desired positionrelative to the reference frame of the front section when the apparatus20 is mounted). A suitable example for setting the deterministicfeatures of mounting system 60 with respect to desired axes of the drivesystem 26 (e.g. Z-axis, T₁ axis) or with respect to the substratetransport plane is disclosed in U.S. patent application Ser. No.11/154,787, filed Jun. 15, 2005 and incorporated by reference herein inits entirety. Accordingly, the position deterministic features of themounting system 60, on different transport apparatus similar toapparatus 20, may be repeatably established in a desired known relationto the drive axes of each such apparatus, so that there is substantiallyno significant variance between different apparatus. In this embodiment,the mounting system 60 has an upper support shelf 62 and lower mountsupport 64. FIG. 6A is a top plan view of the support structure andshows a top view of the support shelf 62 and lower support 64 FIG. 6B isan enlarged partial perspective view of the support structure 22 inwhich the lower support 64 is partially visible. The configuration ofthe upper and lower supports 62, 64 of the mounting system is merelyexemplary and in alternate embodiments the supports of the supportstructure mounting system may have any desired configuration. In thisembodiment, the upper support shelf 62 and lower support 64 aregenerally flanges, that may be integrally formed with the unitaryconstruction spine member 42. The upper support shelf 62 and lowersupport 64 are cantilevered outward from the backside 42S of the spinemember 42. As seen best in FIG. 5D, the upper support shelf 62 and lowersupport are vertically offset from each other. The vertical offsetdistance between upper support shelf and lower support may be set sothat the CG of the drive section 26 and the movable arm 24 assembly islocated between the upper and lower supports regardless of the Zposition of the movable arm 24 and carriage 55. As seen in FIG. 5C, inthis embodiment, the upper support shelf has a seating surface 62S. Theseating surface 62S may be located in a recess 62R in the support shelfflange. The recess 62R may be sized to receive a conjugal section (notshown) of a mating support (not shown) of the front section structure.The upper support shelf may also have a position determining featuresuch as a pin 62P (that may be provided by a suitable fastener). The pin62P may interface with a hole or slot (not shown) in the mating support(not shown) of the front section 12 to define or lock the position ofthe apparatus 20 in either the X or Y direction or both the lowersupport 64 may have a vertical contact surface 64S as shown in FIGS. 5Cand 6A. The contact surface 64S may abut a mating surface (not shown) onthe front section structure to restrain the apparatus 20 in the Ydirection. The lower support may also have position determining pin64P1, 64P2 (formed also for example by suitable fasteners). Thepositioning pins 64P1, 64P2 may be located at opposite end of the lowersupport as shown in FIG. 6A, or may be located at any other desiredlocation. The pins 64P1, 64P2 may serve to lock the apparatus in the Zdirection by engaging receiving apertures in mating structure (notshown) of the front section 12. As may be realized, the interfacebetween the positioning pins 62P, 64P1, 64P2 and mating structure isconfigured to avoid creating any over constraints. Accordingly, thepositioning pins 62, 64P1, 64P2 cooperate (provide 3 points) to definethe mounting plane of the apparatus 20 relative to front sectionreference plane.

Referring again to FIGS. 5C-5D, the Z-drive section 34 of drive system26 has carriage 50 carriage 50 has a frame, chassis or casing 70.Platens 26P (see also FIG. 5B) are connected to the carriage casing 70allowing the carriage to slide along rails 26R along the Z-axis of theapparatus as previously described. As seen in FIG. 5C, the carriagecasing 70 may be connected to the ball screw slide 56. As may berealized, rotation of the ball screw 52, by motor 54, causes the ballscrew slide 56 (that is held rotationally fixed by the casing 70) tomove axially along the ball screw along the Z-axis of the apparatus. Thecarriage casing 70 is thus along the Z-axis under the impetus of theball screw slide 56. As noted before, in this embodiment, the drivesection 34 (driving rotation about the T₁ or shoulder axis) is mountedto carriage 50. Drive section 34 may comprise a motor 72 and shaftassembly 74. The motor T₂ in this embodiment, may be housed or otherwiselocated inside the carriage casing 70. In alternate embodiments, themotor power in T₁ axis rotation may be mounted in any other desiredmanner to the Z-axis carriage. The motor 72 may be any suitable motorsuch as brushless DC, AC or stepper motor. In this embodiment, the motorstator 72S is fixedly connected to the casing 70. The motor rotor 72R isfixedly mounted to shaft 76 of shaft assembly 74. Shaft assembly 74generally comprises shaft 76, bearing(s) 78, slip ring 80 and encoder82. In this embodiment the shaft assembly 74 is also located insidecarriage casing 70 as seen in FIG. 5D. In alternate embodiments, theshaft assembly may have any other suitable mounting arrangement. Shaft76 is rotatably held in the casing 70 by bearing 78 and thus thealignment of the shaft axis is established as shown. The casing 70 has abore 70B that receives bearing 78 in a force fit. As may be realized,the casing 70 attitude may be controlled, such as by a suitableadjustment device for example using variable shims between casing andplatens 26P so that the bore centerline is parallel or true to the Z_(s)axis of the frame structure 22 (or Z-axis of the apparatus). A fixturemay be used to set the alignment of the carriage bore centerline, asdescribed in aforementioned U.S. patent application Ser. No. 11/154,787to provide repeatability in alignment of different transport apparatussimilar to apparatus 20. Shaft 74 mounted by bearing 78 in casing 70 isthus aligned with the bore centerline, and thus is substantiallyparallel with the Z-axis of the apparatus. The axis of rotation of shaft76 is the shoulder axis of rotation T₁, and as described above therotation axis T₁ is established true to the z-axis (the axis of linearposition of the arm). Moreover, here again it may be realized thatstatic and dynamic loading conditions generated during motions of theapparatus 20 or of the traverser (not shown) in the event the apparatusis on a traverser, will not generate appreciable misalignment betweenthe T₁ axis and Z-axis because the alignment of these axes is set by acommon rigid member; spine member 42 of the support structure (i.e. T₁axis is directly dependent on spine member, and Z-axis is defined byspine member as described before). This ensures that all motions (Z, θ,R) of the apparatus end effectors 32A, 32B (see FIG. 2) are alwayspredictable and repeatable. Encoder 82 may be mounted onto shaft 76, andis communicably linked to the controller 40D (see FIG. 1) to providedesired control of motor 72. Shaft 76 may be hollow. The slip ring 80may be mounted to shaft 76. The slip ring is connected to a suitablepower, and signal coupling on the casing 70 for providing power andcommunication to devices on the arm 24. As seen in FIG. 5D, the shaftassembly 74 also may have a pneumatic feed line 84. The pneumatic feedline 84 may extend through interior of shaft 76 to a feed port. Thecasing 70 may have a suitable pneumatic coupling mated to the feed porton the shaft assembly to a pneumatic feed and allow continuous rotationof the shaft 76 (and hence continuous rotation of the arm about theshoulder joint axis T₁).

Referring now again to FIGS. 4A, 4B, arm assembly 24 is mounted tocarriage 50. In particular, upper arm 28 of the arm assembly 24 ismounted to the end 76E of the shaft 76 mounted in carriage 50 (see alsoFIG. 5D). FIG. 7 is a perspective view of the upper arm 28 of armassembly 24. FIG. 7A is a cross-sectional view, and FIGS. 7B and 7C arerespectively top and bottom perspective views of the upper arm 28 asshown, in this embodiment the upper arm has a lower section or turret 84and upper section 86. The turret 84 has a hollow generally cylindricalshape. The upper section 86 depends from the turret 84 as shown. Theupper arm 28 is a one-piece member (or may also be referred to as beingof unitary construction) and the turret 84 and upper section 86 areintegrally formed in the unitary construction upper arm 28. The upperarm 28 may be formed by casting, forging or any other suitable formationprocess. The upper arm may be made of metal, such as aluminum alloy,stainless steel or from non-metallic materials such as plastic, ceramicor composites. In alternate embodiments, the turret and upper section ofthe upper arm may have any other suitable shape. As seen in FIG. 7B, theupper section has an access way or aperture 86A in the top 86T. Theaccess way 86A may have any suitable shape, and is sized to allow readyaccess to an operator to components in the upper arm 28 as will bedescribed further below. The turret 84 may also have an access way(s)84A formed therein for access to components interior to the turret 84.In this embodiment, the access way 84A in turret 84 is shown located ona side of the turret generally opposite the direction in which uppersection 86 projects from the turret. In alternate embodiments, theaccess way(s) in the turret may be located on any desired side(s) suitedfor accessing components interior to the turret. As shown in FIG. 7B,turret 84 may have other opening(s) 84H to lighten the turret or foraccess as desired. Outer covers 28C (see FIG. 4A) may be mounted toclose the turret 84. The bottom end 84L of the turret 84 may have amounting hub or coupling 84H for connecting the upper arm to the end 73Eof T₁ rotation shaft 76 in the carriage 50. As seen best in FIGS. 7A and7C, the mounting coupling 84A of the turret 84 has mounting surfacesarranged to generally conform to the end 76E (see also FIG. 5D) of shaft76. When mounted to the shaft 76, the turret 84 extends through opening44D (see also FIGS. 5C and 6A) in the upper end plate 44 into the space22S (see FIG. 5A) defined by support structure 22. The turret coupling84H is attached to the end 76E of shaft 76 by suitable fasteners capableof transmitting the shear and axial loads across the turret to shaftcoupling. The upper arm 28 is shown in its mounted position in FIG. 4B.Upper arm section 86 is located over end plate 44. As may be realized,upper arm 28 may be continuously rotated about axis T₁ (see FIG. 2) byshaft 76. The unitary construction upper arm 28, with integral turret 84and upper arm section 86 eliminates a coupling connection thatsimplifies assembly of the movable arm 26. Moreover, the turret 84,having a much larger torsional area, in comparison to shaft 76, enablesthe T₁ drive section motor 74 to be mounted low (i.e. inside theZ-carriage) in the support structure, for achieving a low apparatus 66and reducing overturning moment on the apparatus mounts, while keepingthe drive shaft 76 short, for reduced shaft flexing and improvedmovement accuracy of the arm.

As seen in FIG. 4B, the drive system 26 has a drive module 38 that isremovably attachable to the arm 24. The drive module 38 isinterchangeable with a number of substantially similar drive modules 38A(schematically illustrated in FIG. 4B) that have different drivecharacteristics as will be described in greater detail below. The drivemodule 38 is seen best in FIG. 9. The drive module 38 generally has acasing and a motor cluster 92. The motor cluster 92 is located in thecasing 90. The casing 90 mounts the drive module 38 to section 86 of theupper arm 28 (see also FIG. 8 which is a plan view of the upper armsection 86). In the exemplary embodiment, the motor cluster 92 includesthree (3) motor assemblies 94A, 94B, 94C. In alternate embodiments, themotor cluster may have more or fewer motor assemblies. Otherinterchangeable modules 38 of the drive system may have a motor cluster92A with two (2) or one (1) motor assemblies similar to assemblies 94A,94B, 94C. Each motor assembly 94A, 94B, 94 c is substantially similar inthis embodiment. Hence, the motor assemblies 94A, 94B, 94C arethemselves interchangeable. As motor assemblies 94A, 94B, 94C aresubstantially similar, the motor assemblies will be described in greaterdetail below with particular reference to motor assembly 94A. Motorassembly 94A has a motor 96A and shaft 98A. The motor 96A may be abrushless DC, AC or stepper motor, or any other suitable type of motor.The motor assembly 94A may be removable as a unit from casing 90. Inalternate embodiments, the motor and shaft may be separately removablefrom the module casing. Motor assemblies 94A, 94B, 94C are positioned inthe module casing 90 as shown. In this embodiment, the casing 90 mayhave housings 90A, 90B, 90C for each motor assembly 94A, 94B, 94C. Byway of example, casing 90 may have a motor assembly housing 90A for T₂motor assembly 94A (i.e. the motor assembly 94A for driving independentrotation about T₂/elbow axis shown in FIG. 2), housing 90B for W₁ motorassembly 94B (i.e. the motor assembly 94B for driving independentrotation about W₁/wrist axis, shown in FIG. 2) and housing 90C for thesecond W₁ motor assembly 94C (i.e. the motor assembly 94C for drivingsecond end effector independent rotation about W₁/wrist axis). Inalternate embodiments, the module casing may be shaped to form a commonhousing for the motor assemblies of the motor cluster, or may have anyother desired arrangement. As maybe realized, in other interchangeablemodules similar module 38A, with fewer motor assemblies (forindependently driving independent rotation about fewer axes ofrotation), one or more of the housing, similar to housings 90A-90C, maynot have a motor assembly located therein. For example, in the case of adrive module 38A with no second W₁ motor assembly, the motor assemblyhousing (similar to housing 90C) for housing the second W₁ motorassembly would be empty. In alternate embodiments where the motorcluster has more than three motor assemblies (described here for examplepurposes only) the module casing may be provided with more motorassembly housings. In other alternate embodiments, the module casing mayhave housings specific to the number of motor assemblies to be providedin the drive module. Thus, for example, for three motor assemblies therewould be three corresponding housings, for two motor assemblies. Therewould be two corresponding housings, and so on. In this case, the modulecasing, and hence the module, would still be interchangeable; the modulecasing of each the different interchangeable modules having similargeneral configuration and mounting features for mounting the module tothe upper arm 28.

As may be realized from FIG. 4B, the configuration of the movable armassembly 24 may be selected by selecting the module 38, 38A with themotor cluster 92, 92A having the desired number of motor assemblies, toprovide the arm with the desired number of independent axes of rotation.By way of example, movable arm 26 is shown having (in addition to axesT₁ and Z) three (3) independent axes of rotation (e.g. independentrotation of forearm link 30 about axis T₂, independent rotation of bothend effectors 32A, 32B about wrist axis W₁). Accordingly, to provide armassembly 26 with three (3) independent axes of rotation, drive module 38is selected for installation. If it is desired to provide the movablearm 26 with two or one independent axis of rotation, then aninterchangeable drive module 38A with motor cluster 92A having acorresponding number of motor assemblies may be selected forinstallation in upper arm 28.

As noted before, the configuration of the module casing 90 shown in thedrawings is merely exemplary, and in alternate embodiments the modulecasing may have any other desired configuration. Casing 90 may have amounting flange(s) 90F for attaching the module 38, 38A to the upper arm28. In this embodiment the mounting flange(s) project outwards anddefine seating surfaces 90S (see FIG. 9) that overlap conformal matingsurfaces 86S (see FIG. 7A) located inside the turret 84 of the upperarm. As may be realized from FIGS. 7A and 9, and as seen in part in FIG.7, when mounted to the upper arm, the drive module 38 is located in theturret 84 of the upper arm. In alternate embodiments, the module casingmay have mounting features of any other desired configuration. Whenmounted in the upper arm 28, the shaft ends of the motor cluster shafts98A-98C are located in the upper arm section 86. As seen in FIG. 9, inthis embodiment the module casing housings 90A-90C, are verticallystaggered relative to the mounting flange 90F. The vertical stagger ofthe housings 90A-90C, positions the toothed pulleys 110A-110C (see FIG.8) on the ends of the corresponding shafts 98A-98C, at a commensuratevertical spacing to allow each pulley to be connected to a correspondingtransmission 112, 114, 116. Hence, as noted before, the substantiallyidentical motor assemblies 94A, 94B, 94C of the module 38, 38A areentirely interchangeable and may be swapped with each other and each maybe located in any of the housings 90A, 90B, 90C without differentiationand without modification. In this embodiment, the standoff of eachcorresponding end of shaft pulley 110A, 110B, 110C above the top of thecorresponding housings 90A, 90B, 90C is the same. As seen in FIG. 9, inthis embodiment, the housing 90 for the T₂ motor assembly 94A is locatedhighest, with housing 90B for the W₁ motor assembly 94B (driving endeffector 32A) in the middle, and housing 90C for the second W₁ motorassembly 94C (driving end effector 32B) lowest.

Referring now to FIG. 8, there is shown a top plan view of the upper arm28. As seen in FIG. 8, coaxial shaft assembly 40 is mounted to theoutward end of upper arm 28. As noted before, the forearm 30 ispivotally mounted to the upper arm 28 by coaxial shaft assembly 40.Coaxial shaft assembly defines the elbow axis of rotation T₂. FIGS.10-10A are respectively a perspective view and top plan view of theforearm 30. Referring also to FIGS. 11-11 there is shown respectively across-sectional view of the forearm 30 and a cross-sectional view of thecoaxial shaft assembly 40. As seen best in FIG. 11A, coaxial shaftassembly 40 in this embodiment includes three concentric shafts 124,126, 128. The shafts 124, 126, 128 are radially supported respectivelyfrom each other, by suitable bearings B, in a generally nestedarrangement. Outer shaft 124 is radially held in the upper arm bybearing BB. The shafts 124, 126, 128 of the W-axial shaft assembly 40are capable of rotating about the common axis of rotation T₂. Inalternate embodiments, the coaxial shaft assembly may have more or fewercoaxial shafts. As seen in FIG. 11A, the outer shaft 124 is fixed to theforearm 30 so that forearm and shaft 124 rotate as a unit about axis T₂.Outer shaft also has an idler pulley 112P for transmission 112 (in thisembodiment an endless loop transmission though any suitable transmissionmay be used) fixed thereon. Idler pulley 112P and shaft 124 rotate as aunit. Middle shaft 126 has an idler pulley 114P fixed thereon. Middleshaft 126, in this embodiment is shown as a one-piece member withintegral pulley 114P, though in alternate embodiments the idler pulleymay be fixed to the shaft in any suitable manner. Idler pulley 114P ispart of transmission 114, which in this embodiment is also an endlessloop. Middle shaft 126 is fixedly joined at its upper end tointermediate transfer pulley 120P. Thus, shaft 126 and the pulleys fixedthereto, idler 114P, and transfer 120P rotate as a unit. The reductionratio between idler and transfer pulley may be about 2:1 though anyother desired ratio may be used. The inner shaft 128 has idler pulley116P fixed thereon for transmission 116. Shaft 128 may also be aone-piece member with integral idler pulley 116P. Shaft 128 has transferpulley 122P fixed to its upper end as shown. Thus, shaft 128 and pulleys116P, 122P fixed thereon rotate as a unit. As seen best in FIG. 8, therespective drive pulleys 110A, 110B, 110C of the motor assemblies, inthe motor cluster, are connected to the corresponding pulleys 112P,114P, 116P of shaft assembly 40 by transmission belts 112, 114, 116.Drive pulley 110A is connected by belt 112 to pulley 112P, drive pulley110B is connected by belt 114 to pulley 114P and drive pulley 110C isconnected by belt 116 to pulley 116P. Belt tensioners 150A, 150B, 150Care mounted to the upper arm 28 to provide and maintain desired tensionon the transmission belts as will be described further below. Thus drivepulley 110A (on motor assembly 94A) rotates forearm 30 about axis T₂,and drive pulley 110B (on motor assembly 94B) rotates transfer pulley120P about axis T_(2f) and drive pulley 110L (on motor assembly 94C)rotates transfer pulley 122P about axis T₂. In the embodiment shown, thedrive to idler pulley diameter ratio may be about 1:4 though anysuitable ratio may be used.

Referring still to FIGS. 10-10A and 11, the transfer pulleys 120P, 122Pare respectively connected by transmissions 120, 122 to correspondingidler pulleys 120I, 122I and coaxial shaft assembly 140. As seen best inFIG. 11, coaxial shaft assembly 140 is held by suitable bearings onforearm 30. A cross sectional view of coaxial shaft assembly 140 isshown in FIG. 11B. Coaxial shaft assembly 140 has concentric outer andinner shafts 142, 144 that are rotatably supported to rotate aboutcommon axis of rotation W₁. Shafts 142, 144 may be provided with sliprings and pneumatic feed through so that the shafts are capable ofcontinuous rotation. The outer shaft 142 has idler pulley 122I, fortransmission 122, fixed thereon so that shaft and idler rotate as aunit. The lower end effector 32B is fixed to outer shaft 142 so that endeffector 32B and shaft 142 also rotate as a unit. Inner shaft 144 asidler pulley 120I, for transmission 120, fixed thereon so that shaft andidler rotate as a unit. The upper end effector 32A is fixed to innershaft 144 to rotate as a unit with the shaft. As seen in FIGS. 10 and11, the transmissions 120, 122 respectively connecting transfer pulley120P to idler 120I, and transfer pulley 122P to idler 122I, are endlessloop transmission in this embodiment. In alternate embodiments, anysuitable transmissions may be used. The reduction ratio between transfer120P, 122P and idler pulleys 120I, 122I, may be about 1:2, though anydesired reduction ratio may be used. As seen in FIG. 10A, tensioners120T, 122T are mounted in the forearm and biased against transmissionbelt 120, 122 to generate desired belt tension. Referring now also toFIG. 3A, there is shown a top plan view of the movable arm 24 and thesection of the drive system located thereon.

FIG. 3A shows the motor assemblies 94A, 94B, 94C of drive module 38,connected respectively for driving T₂ axis rotation via transmission112, and independent W₁ axis rotation of two end effectors 32A, 32B viatransmission 114, 116 and secondary transmission 122, 120. As may berealized, in the case where a drive module 38A with fewer motorassemblies is mounted in the drive system, for example having motorassemblies similar to assemblies 94A, 94C (for T₂ axis rotation andsingle W₁ axis rotation) and without a motor assembly similar toassembly 94B (i.e. no second independent W₁ axis rotation), thencorrespondingly fewer transmissions would be located in the arm. Forexample, if the drive module has no motor assembly similar to assembly94B, then transmissions 114 and 120 would not be installed in the arm.Hence, one end effector similar to end effector 32A would not beindependently rotatable about axis W₁ or may be removed from the arm.Thus, the arm configuration is selectable by selecting drive module 38,38A to be installed in the drive system.

Referring still to FIGS. 3A, 8 and 10, and as noted before eachtransmission 112, 114, 116, 120, 122 is tensioned by a correspondingbelt tensioner 150A, 150B, 150C, 120T, 122T. In this embodiment, thetensioners 150A, 150B, 150C, 120T, 122T are substantially similar, andhence will be described below with specific reference to tensioner 122Tseen best in FIG. 10A. In alternate embodiments any suitable tensionerconfiguration may be used. Tensioner 122T generally comprises a roller160 pivotally mounted on a movable base 162. In this embodiment, base162 is a pivotable link pinned at one end, though any suitable movablebase may be provided. The movable base 162 may also have a positionlock, in the embodiment shown a friction lock 162L provided by torquinga fastener against the side of the base, to lock the base and hence thetensioner 122T in a position in which the tensioner engages and suitablytensions the corresponding transmission 122. The movable base 162 may beresiliently biased, by a spring or pneumatically (not shown) to urge thetensioning roller 160 against the transmission 122. In the embodimentshown, the tensioner 122T may include a suitable force transducer 164.The force transducer 164 may be of any suitable type such as apiezo-electric force transducer, strain gage, an electro-optical forcetransducer, generating a signal corresponding to a force generated bythe tensioning roller 160 against the transmission belt 122. The forcetransducer 164 shown schematically in FIG. 10A may be mounted in anydesired location on the tensioner suited to the transducer type beingused. The transducer 164 is connected by suitable communication links(not shown), that may be wireless, or wired, to controller 400 (see alsoFIG. 1). The controller 400 has program modules 401, 404, at least oneof which having suitable programming for registering the signals fromthe force transducer and determining from the signals the tensioningforce applied by the tensioning roller 160 on the transmission 122.Further, the programming in the controller is capable of determiningwhen the force applied by the tensioner 122T on the transmissionprovides the desired tension on the transmission. The controllerprogramming may then send a command enabling an indication on a suitableuser interface (not shown), for example emitting an aural tone from asound device, or activating an indicator light on a user interface, toindicate that the desired tension on the transmission has been achieved.The movable base of the tensioner 122T may then be locked into position.This system eliminates any guess work when setting up the drive system26 and avoids overtensioning of the transmissions. The controller 400may also be programmed to periodically sample the signal from thetensioner force transducer for monitoring the operating status of thetransmissions. The controller may be programmed with an operating rangefor the transmission tension, and also programmed to generate suitableindications, when the transmission tension is outside the range. Thus, adrive system health monitoring system is also provided.

While particular embodiments have been described, various alternatives,modifications, variations, improvements, and substantial equivalentsthat are or may be presently unforeseen may arise to Applicant's orothers skilled in the in the art. Accordingly, the appended claims asfiled, and as they may be amended, are intended to embrace all suchalternatives, modifications, variations, improvements and substantialequivalents.

What is claimed is:
 1. A substrate transport apparatus comprising: aframe; a drive section connected to the frame, the drive sectionincluding a shoulder drive section disposed in the frame and anarticulated joint drive section, the shoulder drive section including ashoulder axis rotation motor and a Z-drive motor; and an articulated armhaving a configuration that has a common shoulder joint and apredetermined number of articulating joints, the articulated arm beingconnected to the drive section for articulation of at least one of thearticulating joints so that the articulating joints are movedindependently by the drive section and effect transport motion with thearticulated arm along a transport plane; wherein the frame is of asemi-monocoque configuration and includes a substantially rigid spinethat includes at least one shoulder drive of the shoulder drive sectionand engaged with each motor of the shoulder drive section and thearticulated joint drive section so that each motor depends from thesubstantially rigid spine and static and dynamic driving loads generatedby all motors of the shoulder drive section and the articulated jointdrive section and all drive transmissions drivingly coupling the motorsof the shoulder drive section and the articulated joint drive section tothe articulated arm effecting the transport motion of the articulatedarm bear against and are transmitted via the substantially rigid spineto the semi-monocoque frame so as to be borne by the semi-monocoqueframe and the substantially rigid spine, integral to and with thesemi-monocoque frame, onto a base of the semi-monocoque frame, thesubstantially rigid spine being distinct from and substantially rigidrelative to adjacent integral sections of the semi-monocoqueconfiguration that are adjacent the substantially rigid spine, where thesubstantially rigid spine is coupled to the adjacent integral sectionsof the semi-monocoque configuration of the frame so that the adjacentintegral sections depend from the substantially rigid spine and thesubstantially rigid spine fixes the attitude of the transport plane. 2.The substrate transport apparatus of claim 1, wherein the spine is ofunitary construction.
 3. The substrate transport apparatus according toclaim 1, wherein the articulated arm comprises a number of rigid armlinks movably joined together to define the articulating joints.
 4. Thesubstrate transport apparatus according to claim 1, wherein thearticulating joints are pivot joints.
 5. The substrate transportapparatus according to claim 1, wherein the articulated arm is a scaraarm having two end effectors.
 6. The substrate transport apparatusaccording to claim 5, wherein the scara arm has a selectableconfiguration that is selectable between the arm having one of the twoend effectors not being independently rotatable and the arm having bothof the end effectors being independently rotatable.
 7. The substratetransport apparatus according to claim 1, wherein the drive section hasat least one selected motor module that is removably attachable as aunit to the articulated joint drive section.
 8. The substrate transportapparatus according to claim 1, wherein the substantially rigid spineincludes at least one kinematic coupling disposed therein, the kinematiccoupling effecting an alignment of the transport plane.
 9. The substratetransport apparatus according to claim 8, wherein the at least onekinematic coupling has a predetermined spatial relationship with atleast a rotational axis of the shoulder drive section.
 10. The substratetransport apparatus of claim 8, wherein the at least one kinematiccoupling is disposed on a side of the substantially rigid spine and isconfigured to kinematically couple the frame to a substrate processingapparatus, aligning and fixing the transport plane within the substrateprocessing apparatus.
 11. The substrate transport apparatus of claim 1,wherein all sections of the drive section and articulated arm supportsformed by the drive section are directly connected to and supported bythe substantially rigid spine.
 12. The substrate transport apparatus ofclaim 1, wherein the substantially rigid spine defines a prime loadingmember that substantially carries all static and dynamic loads impartedon the frame by the drive section and articulated arm.
 13. A substratetransport apparatus comprising: a frame; a drive section connected tothe frame, the drive section including a shoulder drive section disposedin an articulated joint drive section, the shoulder drive sectionincluding a shoulder axis rotation motor and a Z-drive motor; and anarticulated arm having a configuration that has a common shoulder jointand a predetermined number of articulating joints, the articulated armbeing connected to the drive section for articulation of at least one ofthe articulating joints so that the articulating joints are movedindependently by the drive section and effect transport motion with thearticulated arm along a substrate transport plane; wherein the frame isof a semi-monocoque configuration and includes a drive section fixingmember that includes at least one shoulder drive of the shoulder drivesection and engaged with each motor of the shoulder drive section andthe articulated joint drive section so that each motor depends from thedrive section fixing member and static and dynamic driving loadsgenerated by all motors of the shoulder drive section and thearticulated joint drive section and all drive transmissions drivinglycoupling the motors of the shoulder drive section and the articulatedjoint drive section to the articulated arm effecting the transportmotion of the articulated arm bear against and are transmitted via thedrive section fixing member so as to be borne by the semi-monocoqueframe and the drive section fixing member, defined by a side of thesemi-monocoque frame and integral to and with the semi-monocoque frame,onto a base of the semi-monocoque frame, the drive section fixing memberbeing distinct from and substantially rigid relative to adjacentintegral sections of the semi-monocoque frame that are adjacent thedrive section fixing member, the drive section fixing member is coupledto the adjacent integral sections of the semi-monocoque frame so thatthe adjacent integral sections depend from the drive section fixingmember and the drive section fixing member being configured to fix anarm lift axis so that an attitude of the arm lift axis with respect tothe substrate transport plane is set by the drive section fixing member.14. The substrate transport apparatus of claim 13, wherein the drivesection fixing member is of unitary construction.
 15. The substratetransport apparatus according to claim 13, wherein the articulated armcomprises a number of rigid arm links movably joined together to definethe articulating joints.
 16. The substrate transport apparatus accordingto claim 13, wherein the articulating joints are pivot joints.
 17. Thesubstrate transport apparatus according to claim 13, wherein thearticulated arm is a SCARA arm having two end effectors.
 18. Thesubstrate transport apparatus according to claim 17, wherein the SCARAarm has a selectable configuration that is selectable between the armhaving one of the two end effectors not being independently rotatableand the arm having both of the end effectors being independentlyrotatable.
 19. The substrate transport apparatus according to claim 13,wherein the drive section has at least one selected motor module that isremovably attachable as a unit to the articulated joint drive section.20. The substrate transport apparatus according to claim 13, wherein thedrive section fixing member includes at least one kinematic couplingdisposed therein, the at least one kinematic coupling effecting analignment of the substrate transport plane.
 21. The substrate transportapparatus according to claim 20, wherein the at least one kinematiccoupling has a predetermined spatial relationship with at least arotational axis of the shoulder drive section.